1.D.85. The Silicon Nanopore (SNP) Family
Nanopore-based analyses have the potential for exceptionally versatile applications in medicine. Khan and Williams 2015 presented a novel step towards fabrication of a single solid-state nanopore (SSSN) in a thin silicon membrane. Silicon nanopores are made in multistep processes on both sides of n-type silicon-on-insulator (SOI) wafer with resistivity of 1-4 ohm.cm. An electrochemical HF etch with low current density (0.47 mA/cm2) was employed to produce SSSN. Blue LED was allowed to emit light in a narrow band region which facilitated the etching procedure in a unilateral direction. This helped to produce straight nanopores in n-type Si. A variety of pore diameters were demonstrated using different HF concentrations. Atomic force microscopy was used to iluminate the surface morphologies of the fabricated pores in non-contact mode. Pore edges exhibited a pronounced rounded shape and offered high stability to fluidic artificial lipid bilayers for the purpose of studying membrane proteins (Khan and Williams 2015).